| 摘要 |
<p>PURPOSE: A substrate processing apparatus and a method for transferring a substrate of the same are provided to reduce transfer time of receiving container waiting for a process by including an additional buffer port. CONSTITUTION: A substrate processing apparatus comprises a process module(101), a main load stock(200), and a buffer load stock(301). The process module processes the substrate. The main load stock comprises a plurality of load ports(210,220,230,240). The main load stock transfers substrate between the containing box and the process module. The buffer load stock transfers the loaded containing box. The buffer load stock comprises at least buffer ports(320,330). The buffered port loads the containing box on the main load stock. The buffered port picks up the containing box loaded in the main load stock.</p> |
