METHOD FOR FORMING CONTACT PLUG IN SEMICONDUCTOR DEVICE,申请号KR20060095063-传众专利搜索

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发明名称	METHOD FOR FORMING CONTACT PLUG IN SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100945227(B1)	申请公布日期	2010.03.03
申请号	KR20060095063	申请日期	2006.09.28
申请人		发明人
分类号	H01L21/28;B24B37/00;C09K3/14;H01L21/304;H01L21/336;H01L21/768;H01L21/8247;H01L27/115;H01L29/788;H01L29/792	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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