METHOD, DEVICE, AND BASE MATERIAL FOR MANUFACTURING POLYIMIDE FILM WITH PATTERN FORMED THEREON

摘要

<P>PROBLEM TO BE SOLVED: To provide a polyimide film with highly flat and precise pattern formed thereon. Ž<P>SOLUTION: A method for manufacturing the polyimide film with one pattern formed thereon includes: a process for forming a polyimide precursor layer on a base material 10; a pattern forming process for forming patterns of the polyimide precursor layer; a heating process for forming polyimide resin layers 16 by heating the polyimide precursor layer with the pattern formed thereon; and a separating process for separating the polyimide resin layers 16 from the base material 10 by contacting a solution 62 including hydrofluoric acid with the base material 10 and the polyimide resin layers 16. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž