| 摘要 |
PROBLEM TO BE SOLVED: To enable analysis even with respect to the origin of the part separated from the center part of a profile in X-ray diffraction measurement. SOLUTION: A sample such as a bulk crystal is subjected to X-ray diffraction measurement to be structurally analyzed. At this time, a scanning angle is set asΔθand the angle formed by a reflection index hkl surface and the surface of the sample is set asθc to plot the horizontal axis of an X-ray diffraction profile asΔθ/sinθc while it is determined that the peak expaning shape of an analyzing target peak is the peak expanding shape caused by a local twist distribution produced by the mosaicism of the crystal. This determination method has a process for measuring the X-ray diffraction profile under two kinds of conditions, that is, a wide opening angle condition and a narrow opening angle condition and identifying that the peak expanding shape showing invariability under both opening angle conditions corresponds to the universal distribution caused by the twist distribution. COPYRIGHT: (C)2010,JPO&INPIT
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