SUBSTRATE FOR SUSPENSION, PROCESS FOR PRODUCING THE SAME, SUSPENSION FOR MAGNETIC HEAD, AND HARD DISK DRIVE

摘要

A substrate for suspension 10 comprises a metallic substrate 1, an insulating layer 2 formed on the metallic substrate 1, a conductor layer 3 formed on the insulating layer 2, and a cover layer 4 covering the conductor layer 3. The insulating layer 2 and the cover layer 4 are formed from different materials, whose coefficients of hygroscopic expansion are in the range between 3×10−6/% RH and 30×10−6/% RH. The difference between the coefficients of hygroscopic expansion of the two materials is 5×10−6/% RH or less.