发明名称 WAFER CLEANING ROLLER
摘要 A wafer cleaning roller including a tube body and a plurality of first protrusions is provided. The tube body has a longitudinal direction. The first protrusions are disposed on the outside surface of the tube body. Each of the first protrusions is shaped as a stripe having a first extension direction. The included angle between the first extension direction and the longitudinal direction is an oblique angle.
申请公布号 US2010043160(A1) 申请公布日期 2010.02.25
申请号 US20080195021 申请日期 2008.08.20
申请人 UNITED MICROELECTRONICS CORP. 发明人 CHEN TZU-SHIN
分类号 H01L21/00 主分类号 H01L21/00
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