DUAL-SIDED MICROSTRUCTURED, POSITION-SENSITIVE DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a detector for measuring the position and/or energy of photons and/or charged particles. SOLUTION: The detector includes a plurality of diodes made of a semiconductor material, n-contacts (1) and p-contacts (4), and the n-contacts are provided by dividing an n-layer into individual segments. The segments of the n-layer are 20-500μm wide. The detector is produced by diffusing ions on one side of the semiconductor material in order to produce an n-layer. A metallic layer is vapor-deposited thereon. Trenches are etched and formed between the segments segmented by lithography. The detector has high performance, and inter alia, enables a high local resolution and a high measuring speed. COPYRIGHT: (C)2010,JPO&INPIT