| 摘要 |
PROBLEM TO BE SOLVED: To restrain damage to a substrate W by avoiding the interference of one portion of the substrate W, a floating unit 33 and the like as much as possible while simplifying the configuration of a floating-carrying device 1. SOLUTION: The floating-carrying device has: a plurality of connection circuits 41 connected to one another so that one edge communicates with a corresponding chamber 25; common detection circuits 43 connected to one another so that other edges of the plurality of connection circuits 41 communicate with one another; a pressure sensor 47 for detecting pressure in the common detection circuit 43; and a fan fault determination sensor 51 for determining the presence or absence of a fault in a fan filter unit 37, based on a value detected by the pressure sensor 47. COPYRIGHT: (C)2010,JPO&INPIT
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