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发明名称
PATTERN FORMING MATERIAL AND METHOD OF PATTERN FORMATION
摘要
申请公布号
EP1372033(A4)
申请公布日期
2007.12.12
申请号
EP20020765524
申请日期
2002.09.12
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD
发明人
KISHIMURA, SHINJI;ENDO, MASAYUKI;SASAGO, MASARU;UEDA, MITSURU;FUJIGAYA, TSUYOHIKO
分类号
G03F7/004;G03F7/039;(IPC1-7):G03F7/039;H01L21/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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