SPM NANOPROBES AND THE PREPARATION METHOD THEREOF

摘要

PURPOSE: An SPM(Scanning Probe Microscope) nanoprobe and a manufacturing method thereof for accurately measuring frictional force and adhesive force in a pattern are provided to control the ratio of a diameter of the deposit of a sphere and the diameter of the nano-needle. CONSTITUTION: A probe comprises a structure in which the deposit of a sphere is formed by particle beam induced deposition in the tip-end part of a nano-needle(20). A sectional diameter of the nano-needle and diameter of a circular deposit are range from 8.5 to 1.5. The diameter of the deposit of sphere is 15 nm to 1,000 nm range. In the particle beam conduction evaporation, the particle acceleration voltage is 50 kV range to 5. A particle density researched in the tip-end part is 400 to 10000.