发明名称 METHOD OF PLATING A WAFER
摘要 A plating method for forming a uniform magnetic film in conducting a plating treatment on a wafer with a magnetic film of, for instance, a Fe—Co-based alloy. Specifically, the method comprises the steps of supplying a plating solution through a plating-solution-supply section of a plating tank to a wafer, which placed on an opening of the plating tank, and conducting a plating treatment on the wafer while the plating solution is kept in contact with a plating target surface of the wafer, wherein the plating solution employed is one forming a magnetic film, and the plating treatment is done while a magnetic field is applied to the plating solution in contact with the plating target surface of the wafer.
申请公布号 US2010038252(A1) 申请公布日期 2010.02.18
申请号 US20080189921 申请日期 2008.08.12
申请人 KASUYA YUTAKA 发明人 KASUYA YUTAKA
分类号 C25D5/00 主分类号 C25D5/00
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