| 摘要 |
<P>PROBLEM TO BE SOLVED: To optimize measurement conditions of an efficient EGA sample mark. <P>SOLUTION: In measurement conditions of a sample mark used by enhanced global alignment (EGA), illumination conditions important for capturing an image signal of the mark are first optimized (step 206), and other measurement conditions are optimized under the optimized illumination conditions (step 208), thus suppressing the occurrence frequency of redoing of optimization. <P>COPYRIGHT: (C)2010,JPO&INPIT |
