MULTILAYER-FILM REFLECTIVE MIRROR AND EUV OPTICAL EXPOSURE APPARATUS COMPRISING SAME,申请号EP20080721034-传众专利搜索

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发明名称	MULTILAYER-FILM REFLECTIVE MIRROR AND EUV OPTICAL EXPOSURE APPARATUS COMPRISING SAME
摘要
申请公布号	EP2153254(A1)	申请公布日期	2010.02.17
申请号	EP20080721034	申请日期	2008.02.22
申请人	NIKON CORPORATION	发明人	MURAKAMI, KATSUHIKO;KOMIYA, TAKAHARU
分类号	G02B5/08;G03F7/20	主分类号	G02B5/08
代理机构		代理人
主权项
地址

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