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发明名称
摘要
申请公布号	JP4416521(B2)	申请公布日期	2010.02.17
申请号	JP20040015820	申请日期	2004.01.23
申请人		发明人
分类号	H01L21/22;G02F1/13;H01L21/31;H01L21/324	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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