MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same,申请号EP20020258592-传众专利搜索

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发明名称	MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same
摘要
申请公布号	EP1325884(B1)	申请公布日期	2010.02.17
申请号	EP20020258592	申请日期	2002.12.13
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, EUN-SUNG;LEE, MOON-CHUL;KIM, HYUN-OK
分类号	B81B3/00;B81C1/00	主分类号	B81B3/00
代理机构		代理人
主权项
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