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发明名称
Interferometer calibration system and method.
摘要
申请公布号
NL1037087(C2)
申请公布日期
2010.02.16
申请号
NL20091037087
申请日期
2009.06.30
申请人
AGILENT TECHNOLOGIES, INC.
发明人
GERAINT OWEN
分类号
G01D5/38;G03F7/20
主分类号
G01D5/38
代理机构
代理人
主权项
地址
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