| 发明名称 |
NOVEL LANTHANIDE BETA-DIKETONATE PRECURSORS FOR LANTHANIDE THIN FILM DEPOSITION |
| 摘要 |
Methods and compositions for depositing a film on one or more substrates include providing a reactor and at least one substrate disposed in the reactor. At least one lanthanide precursor is provided in vapor form and a lanthanide thin film layer is deposited onto the substrate.
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| 申请公布号 |
US2010034719(A1) |
申请公布日期 |
2010.02.11 |
| 申请号 |
US20090536804 |
申请日期 |
2009.08.06 |
| 申请人 |
DUSSARRAT CHRISTIAN;OMARJEE VINCENT M |
发明人 |
DUSSARRAT CHRISTIAN;OMARJEE VINCENT M. |
| 分类号 |
B05D5/12;C01F17/00;C07F5/00;H01L21/314 |
主分类号 |
B05D5/12 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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