发明名称 PROCESS FOR LARGE-SCALE AMMONOTHERMAL MANUFACTURING OF GALLIUM NITRIDE BOULES
摘要 A method for large-scale manufacturing of gallium nitride boules. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and grown ammonothermally. The seed orientation and mounting geometry are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus. The method is scalable up to very large volumes and is cost effective.
申请公布号 US2010031875(A1) 申请公布日期 2010.02.11
申请号 US20090534844 申请日期 2009.08.03
申请人 SORAA, INC. 发明人 D'EVELYN MARK P.
分类号 C30B7/10 主分类号 C30B7/10
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