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发明名称
Mobiler, elektrostatischer Substrathalter und Verfahren zur Halterung eines Substrates auf einem mobilen, elektrostatischen Substrathalter
摘要
申请公布号
DE102004045447(B4)
申请公布日期
2010.02.11
申请号
DE200410045447
申请日期
2004.09.18
申请人
TECHNOLOGIEZENTRUM SIEGEN GMBH
发明人
HINN, MICHAEL;RETZLAFF, UDO;KEILBACH, STEFFEN
分类号
H01L21/683;H01L21/02
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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