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发明名称
Galvanometerbewegung mit zwei orthogonalen Drehachsen
摘要
申请公布号
DE112007003345(T5)
申请公布日期
2010.02.11
申请号
DE200711003345T
申请日期
2007.02.13
申请人
OPTICON INC.;OPTOELECTRONICS CO. LTD.
发明人
TAKAHASHI, TORU
分类号
G01D5/30
主分类号
G01D5/30
代理机构
代理人
主权项
地址
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