CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD,申请号KR20080038589-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD
摘要
申请公布号	KR100941833(B1)	申请公布日期	2010.02.11
申请号	KR20080038589	申请日期	2008.04.25
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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