发明名称 THIN PLATE STORAGE TRANSPORT SYSTEM AND RETICLE CASE USING THE SAME
摘要 A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time.
申请公布号 US2010025277(A1) 申请公布日期 2010.02.04
申请号 US20090514558 申请日期 2009.05.12
申请人 MIRAIAL CO., LTD. 发明人 IWAKI TADAO;UMEDA TOSHIYA
分类号 B65D85/48;B65D77/04;B65D81/20;B65D85/00;B65D85/86;G03F1/40;G03F1/66;H01L21/027;H01L21/673 主分类号 B65D85/48
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