| 摘要 |
A nanoscale motion apparatus comprises a fixed base, a movable platform, and means for moving the movable platform connected between the fixed base and the movable platform. A sensing device comprises a holder, at least two nanosensors, and a measurement plate. The holder is mounted on the fixed base. The nanosensors are configured on the holder. The measurement plate is mounted on the movable platform. The measurement plate can be sensed by the nanosensors so as to measure the corresponding variation between the fixed base and the movable platform.
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