Surface texture measuring instrument and measuring method

摘要

A surface texture measuring instrument includes: a measuring device (4) that includes a detector (42) for detecting surface texture of a workpiece (W) and an X-axis movement mechanism (41) for moving the detector (42) in a measurement direction; an elevation inclination adjuster (5) capable of adjusting an elevation position and an inclination angle of a table (52) on which the measuring device (4) is mounted; a stage (3) on which the workpiece (W) is mounted; and a controller (6) that controls the measuring device (4) and the elevation inclination adjuster (5). The controller (6) includes: a measurement controller (62) that controls the X-axis movement mechanism (41) to conduct a preliminary measurement and main measurement of the workpiece (W); a computing unit (65) that acquires a result of the preliminary measurement from the detector (42) and obtains an inclination angle of the workpiece (W) at which the workpiece (W) is inclined to the measurement direction; and a positioning controller (64) for adjusting the inclination angle of the table (52) based on the obtained inclination angle.