PNEUMATIC SERVO VALVE BY PIEZOELECTRIC EFFECT

摘要

PURPOSE: A pneumatic servo valve transferring spool to a piezoelectric effect shaft is provided to improve reliability on the product usage by increasing the linkage operation of spool using a piezoelectric element. CONSTITUTION: A magnet shield(107) is fixed and coupled on an one end of a spool(102). A sleeve(108) is installed within the hollow of the main body and accepts the magnet shield. A safety coil spring(120) transfers the spool in shaft direction and keeps a supply port close. A permanent magnet(109) and a linear hall sensor(106) are installed on the magnet shield and sleeve. The location of the spool receives the feedback and connects a position signal to a controller. A piezoelectric device(111) is a valve body, the spool is transferred shaft. The supply port is kept with the open state.