A RAPID THERMAL PROCESSING APPARATUS FOR LARGE-AREA

摘要

PURPOSE: A rapid thermal processing apparatus for a large-area is provided to increase the heat uniformity of a workpiece by installing a stick lamp inside a quartz tube and supplying uniform heat to a large scale on the workpiece. CONSTITUTION: A chamber has two holes opposite to each other, and the two holes penetrate a side of the chamber. A quartz tube(120) is inserted into ends of two holes. A stick type lamp(130) is inserted into the quartz tube. A lamp guide is formed with a head unit and a body. The head unit of the disc type has an outer diameter bigger than the diameter of the hole. The body comprises a communicating path for interlinking the quartz tube and the outside.