| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device for matching a focus with the whole surface of an inspection target article and conjugating the whole surface of the inspection target article with an imaging element, and to provide a surface inspection method. SOLUTION: The surface inspection device 1 has a holder 5 for supporting a wafer 10, an illumination optical system 20 for irradiating the inspection surface 10a of the wafer 10 supported on the holder 5 with inspecting illumination light, an imaging device 40 for receiving the inspection light from the inspection surface 10a of the wafer 10 irradiated with the inspecting illumination light, and an image processing inspection part 45 for inspecting the inspection surface 10a of the wafer 10 on the basis of the inspection light received by the imaging device 40, wherein a holder 5 is constituted so as to be equipped with a shine-proof condition control part 51 capable of adjusting the angle formed by the inspection surface 10a of the wafer 10 and the optical axis of the inspection light and tilting the imaging device 40 with respect to the optical axis of the inspection light so as to satisfy a shine-proof condition corresponding to the angle by the wafer 10 and the imaging device 40. COPYRIGHT: (C)2010,JPO&INPIT
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