| 摘要 |
A vibrating structure gyroscope includes a ring structure (52), an external frame (58) and a flexible support (56e) including a pair of symmetrical compliant legs (60a, 60b) arranged to retain the ring structure (52) within the external frame (58). Metal track (80) is provided on an upper surface of the ring structure (52), the compliant legs (60a, 60b) and the external frame (58), over an insulating surface oxide layer, not illustrated. Each flexible support (56e) is arranged to carry metal track (80) associated with a single drive or pick- off transducer. The metal track (80) is repeated for eight circuits, one circuit for each transducer. Each circuit of metal track (80) associated with a transducer begins at a first bond-pad (82) on the external frame (58), runs along a first compliant leg (60a), across an eighth segment (84) of the ring structure (52) and back along the other compliant leg (60b) to a second bond-pad 86 on the external frame (58). |
