| 摘要 |
PROBLEM TO BE SOLVED: To efficiently convey an object to be conveyed in a conveyance system for conveying object to be conveyed, such as FOUP (Front Opening Unified Pod) which houses kinds of substrates for manufacturing a semiconductor element, for example, including loading and unloading operations in a housing device. SOLUTION: The conveyance system 100 includes a conveying means 3, a plurality of ports 11 arranged adjacent to an loading/unloading place corresponding to the housing device 31 to respectively perform loading/unloading of the object to be conveyed 2 thereon between the conveying means positioned at the loading/unloading place and themselves, a transfer means 21 capable of transferring the object to be conveyed between the respective ports and an entrance for carrying in/out the object to be conveyed in the housing device, a specifying means for specifying one unloaded port on which the object to be conveyed is not loaded from the plurality of the ports, and a loading control means for controlling the conveying means so that the object to be conveyed is conveyed to the one specified unloaded port and so that the object to be conveyed is loaded on the one specified unloaded port. COPYRIGHT: (C)2010,JPO&INPIT |
