| 发明名称 |
MICROWAVE PLASMA PROCESSING APPARATUS AND METHOD FOR PRODUCING COOLING JACKET |
| 摘要 |
<p>Disclosed is a microwave plasma processing apparatus wherein a slow wave plate and a cooling portion of a cooling jacket are arranged next to each other in a microwave antenna which is a constituent of the microwave plasma processing apparatus.</p> |
| 申请公布号 |
WO2010007863(A1) |
申请公布日期 |
2010.01.21 |
| 申请号 |
WO2009JP61477 |
申请日期 |
2009.06.24 |
| 申请人 |
TOKYO ELECTRON LIMITED;NISHIMOTO SHINYA |
发明人 |
NISHIMOTO SHINYA |
| 分类号 |
H01L21/3065;H05H1/46 |
主分类号 |
H01L21/3065 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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