IMAGE DATA PROCESSING APPARATUS AND METHOD FOR DEFECT INSPECTION, DEFECT INSPECTING APPARATUS AND METHOD USING THE IMAGE DATA PROCESSING APPARATUS AND METHOD, BOARD-LIKE BODY MANUFACTURING METHOD USING THE DEFECT INSPECTING APPARATUS AND METHOD, AND

摘要

Defect candidates are extracted from among photographed images of a board-like body by using a signal threshold value.  From among the extracted defect candidates, the defect candidates at the same position in the width direction are searched, and intervals between the position of the searched defect candidate in a transfer direction and the position of the adjacent defect candidate in the transfer direction are repeatedly obtained, thus, generation frequency distribution of the intervals is obtained.  When the interval generation frequency of interest is over a frequency threshold value, it is discriminated that the board-like body has periodic defects in the transfer direction.  The frequency threshold value is so set as to substantially increase as the interval of interest becomes shorter.