| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of efficiently cleaning an object to be cleaned in the case where the object to be cleaned is housed in a container and cleaned, and a cleaning method. SOLUTION: The cleaning apparatus 1 comprises a container 20 for housing an object to be cleaned for cleaning the object to be cleaned in the container 20 and includes supporting materials 31 and 32 for supporting the container 20, a vibration source 50 for vibrating the container 20, cleaning liquid supply means 60 for supplying a cleaning liquid to the container 20, and cleaning liquid discharge means 65 for discharging the cleaning liquid out of the container 20. COPYRIGHT: (C)2010,JPO&INPIT |
