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发明名称
APERTURED CONDITIONING BRUSH FOR CHEMICAL MECHANICAL PLANARIZATION SYSTEMS
摘要
申请公布号
EP1940587(A4)
申请公布日期
2010.01.20
申请号
EP20060817260
申请日期
2006.10.19
申请人
TBW INDUSTRIES INC.
发明人
BENNER, STEPHEN, J.
分类号
B24B37/04;B24B53/12;B24D13/14
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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