| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To avoid discharge breakdown of an optical waveguide in manufacturing a device. <P>SOLUTION: By a pattern forming step, there are formed, on a dielectric substrate 110, a waveguide pattern 120a having a loopback part 123a, a conductor pattern 312 situated on the outer circumference of the loopback part 123a, and a dummy pattern 130a for connecting the loopback part 123a and the conductor pattern 312. Then, the dielectric substrate 110 with a pattern formed by the pattern forming step is treated for thermal diffusion, making the waveguide pattern 120a into an optical waveguide. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
