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发明名称
摘要
申请公布号	JP4397989(B2)	申请公布日期	2010.01.13
申请号	JP19980373626	申请日期	1998.12.28
申请人		发明人
分类号	G01T1/24;H01L27/148;H01L27/14;H01L29/768;H01L31/00;H04N3/14	主分类号	G01T1/24
代理机构		代理人
主权项
地址

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