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发明名称
IMPROVED PROCESS FOR PREPARING CLEANED SURFACES OF STRAINED SILICON
摘要
申请公布号
EP2143135(A1)
申请公布日期
2010.01.13
申请号
EP20070804888
申请日期
2007.05.03
申请人
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
RADOUANE, KHALID;BALDARO, ALESSANDRO
分类号
H01L21/311;H01L21/306
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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