APPARATUS FOR PROCESSING PLAT DISPLAY PANEL

摘要

PURPOSE: An apparatus for processing flat display panel is provided to prevent the failure of drying a substrate by maintaining fume including a processing liquid constant. CONSTITUTION: A substrate transportation unit supplies a substrate(G) to a process bath. A processing liquid injection nozzle(5) is installed on the process bath and sprays the processing liquid to the substrate. A fume nozzle(7) collects the fume including the processing liquid vapor inside the processing bath. A suction unit is arranged inside the process bath and collects the fume including the processing liquid. A vent unit is connected to the suction unit, and the fluid injection nozzle sprays the fume including the processing liquid to the substrate through a vent unit.