DEVICE FOR SENSING MINUTENESS MATTER

摘要

Provided is a device for sensing a fine material which is capable of quantitatively detecting an amount of the fine material. For this purpose, the device is constructed to sequentially perform the following operations. For example, a cantilever is bent by the force generated when a fine material detectable in an in-situ mode binds to a surface of the cantilever. Then, in order to generate an opposing force against bending of the cantilever, a voltage is modified with a piezoelectric material provided on the cantilever and the modified voltage is applied to return central axes of the electrode and cantilever to be collinear. Upon recovery of collinearity between the electrode and cantilever, an electrical force applied to the piezoelectric material of the cantilever is measured to sense the force exerted on the cantilever by the fine material, such that an amount of the fine material can be quantitatively detected.