| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device which holds a rectangular substrate vertically with little distortion of a measurement object even by an alignment operation. SOLUTION: A vertical holding device includes a pair of holding members 22 and 23 that have flat surfaces brought in contact with lower end surface of a rectangular substrate 100, an upper portion holding member 34 which vertically holds the substrate 100 placed on the pair of holding member 22 and 23 by the upper surface with a flat surface for pressing, and a sliding section 33 which moves the upper portion holding member 34 in an upper or lower direction to adjust pressure to the substrate 100 of the upper portion holding member 34. COPYRIGHT: (C)2010,JPO&INPIT |
