Pressure transducer diaphragm and method of making same

摘要

A method of making a pressure transducer diaphragm 10. One or more trenches 54 are etched in a first surface 63 of a first substrate 50. The trench is rendered etch resistant. A cavity 60 is then formed in a second opposite surface of the first substrate defining a diaphragm supported by a frame with one or more hollow bosses 14 stiffening the membrane.