发明名称 Thermal embossing of resist reflowed lenses to make aspheric lens master wafer
摘要 Methods of forming a lens master wafer having aspheric lens shapes. In one embodiment, a substrate is coated with a polymer material. Isolated sections are formed in the polymer material. The isolated sections are reflowed. The reflowed sections are formed into aspheric lens shapes using a lens stamp.
申请公布号 US2009325107(A1) 申请公布日期 2009.12.31
申请号 US20080213837 申请日期 2008.06.25
申请人 MICRON TECHNOLOGY, INC. 发明人 OLIVER STEVE;HEGDE SHASHIKANT;VIENS JEFF
分类号 G03F7/20;B29D11/00 主分类号 G03F7/20
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