发明名称 |
METHOD OF MEASUREMENT OF RESONANCE FREQUENCIES |
摘要 |
FIELD: measuring technology. ^ SUBSTANCE: invention refers to measuring technology and can be implemented for control over quality of micro-mechanical elements. The method of measurement of micro electro-mechanical system - MEMS consists in fastening MEMS on a movable part of a shake table driven to oscillatory motion with alternate frequency; further radiation from a linear source of light is directed to MEMS, also axis along longer side of the linear source of light is parallel to axis of MEMS rotation; a reflected image in form of line is controlled; notably, resonance moment is fixed by maximal value of width of line reflected from controlled MEMS. ^ EFFECT: upgraded accuracy of MEMS element control, decreased time of measurement. ^ 2 dwg |
申请公布号 |
RU2377509(C1) |
申请公布日期 |
2009.12.27 |
申请号 |
RU20080139222 |
申请日期 |
2008.10.03 |
申请人 |
GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA MOSKOVSKIJ GOSUDARSTVENNYJ INSTITUT EHLEKTRONNOJ TEKHNIKI (TEKHNICHESKIJ UNIVERSITET) |
发明人 |
LAPENKO VADIM NIKOLAEVICH;TIMOSHENKOV SERGEJ PETROVICH;KIK MIKHAIL ANDREEVICH;KIK DMITRIJ ANDREEVICH;PASJUTIN ANTON VIKTOROVICH;CHAPLYGIN JURIJ ALEKSANDROVICH |
分类号 |
G01H9/00;G01H13/00 |
主分类号 |
G01H9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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