| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer housing carrier capable of preventing the occurrence of flaw and damage on a wafer, independent of warping state of the wafer. SOLUTION: At least two support rods which extend toward the other square open end, constituting a wafer support shelf, are implanted at the central part, in left and right directions, of a rear wall plate that closes one of two square open ends formed of a ceiling plate and two sidewall plates fixed to both of left and right ends of the ceiling plate. COPYRIGHT: (C)2010,JPO&INPIT |
