| 摘要 |
PURPOSE:To miniaturize a device, and to improve efficiency by insulating downstream side high pressure electrodes by a gas current, shortening a space between high pressure electrodes and increasing the rate of the occupying of a discharge section in a laser resonator. CONSTITUTION:A laser gas encapsulated into a vacuum vessel 1 flows toward the arrows in the figure by a blower 2, and is circulated. Glow discharge is generated among low voltage electrodes 3A-3D and high voltage electrodes 4A-4D by a high-voltage power supply 5 and discharge resistors 6A-6D, and a laser gas is excited. The laser gas heated by glow discharge is cooled by heat exchangers 7A, 7B. A gas not exposed to discharge is flowed among the gas current downstream side high voltage electrodes (among 4A and 4B and 4C and 4D) through gas flow paths 10A, 10B. Accordingly, spaces filled with the gas having high withstanding voltage can be generated among the high voltage electrodes, thus preventing a bridging by the gas having low withstand ing voltage after discharge of the high voltage electrodes. |
