| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To stably travel on a curve while avoiding the deterioration of conveyance efficiency, in a conveyance device which conveys an object storing a substrate for manufacturing a semiconductor device or the like. <P>SOLUTION: A conveyance device (20) is provided with: a conveyance means (3); a reception means for receiving a conveyance command to set a scheduled route on which the conveyance means travels; a specification means (4) for specifying a speed instruction showing a target speed when the conveyance device travels on the scheduled route; and a decision means (6) for assuming that the conveyance device travels on a new scheduled route shown by a new conveyance command to be received by the reception means while changing a speed toward a new target speed shown by a new speed instruction to be specified, and for deciding whether or not the speed change is completed until the conveyance device enters a prescribed place included in the new scheduled route on the basis of the current speed of the conveyance means and a current target speed shown by the specified current speed command. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
