| 摘要 |
The aim of the method is to characterize an element (21) comprising a plurality of superposed layers separated from one another by interfaces. It comprises at least the following steps: The element (21) is illuminated with radiation (15) emitted by a source (13); radiation (23) transmitted through the element (21) is collected on a detector (17), this transmitted radiation forming an experimental image of the element (21) on the detector (17), the detector (17) being placed at such a distance from the element (21) that interference fringes appear on the experimental image at the interfaces between the layers; and an approximate value of at least one physical characteristic of at least one given layer is determined by calculation from the experimental image, the determination step being implemented by minimizing the difference between the experimental image and a simulated image of at least part of the experimental image of the element (21).
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