| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for accurately determining a disconnected state of a fuse. SOLUTION: An electrical fuse 101 includes: a polysilicon layer 102; a silicide layer 104 formed over the polysilicon layer 102; and a first metal contact 108 and a second metal contact 112 which are arranged over the silicide layer 104 while being spaced from each other. The electrical fuse 101 is configured so that the silicide layer 104, after disconnection, is excluded from a region right under the second metal contact 112 and from a region between the second metal contact 112 and the first metal contact 108. COPYRIGHT: (C)2010,JPO&INPIT |
