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经营范围
发明名称
Method of sealing a vacuum chamber and sluice device for a vacuum chamber
摘要
申请公布号
EP1862567(B1)
申请公布日期
2009.12.16
申请号
EP20070109111
申请日期
2007.05.29
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
GOTTSMANN, LUTZ;LAIMER, GEORG;JAEGER, REINHARD
分类号
C23C14/56;C23C16/54
主分类号
C23C14/56
代理机构
代理人
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地址
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