APPARATUS FOR MANUFACTURING THIN FILM SOLAR CELL

摘要

An apparatus for manufacturing a thin film solar cell is provided with a film-forming chamber wherein a film is formed on a film forming surface of a substrate by a CVD method; an electrode unit having a cathode unit wherein cathodes to which voltages are to be applied are arranged on the both sides, and a pair of anodes which are arranged to face the cathodes, respectively, at a distance therefrom; a mask for covering a peripheral section of the substrate; and an air-releasing duct arranged at the periphery of the cathode unit.  A film-forming space is formed between the cathode unit and the substrate arranged on the anode side, an air-releasing path is formed between the mask and the cathode unit, the air-releasing duct and the film-forming space are connected through the air-releasing path, and a film-forming gas introduced into the film-forming space is released from the air-releasing duct through the air-releasing path.