MICROMIRROR WITH ELECTROMAGNETIC ACTUATION

摘要

The invention relates to a micromirror comprising a reflecting plate (21) rotatably movable around an axis (32) and attached to a frame (23) by two parallel arms (27, 29) aligned on both sides of the plate to form the axis, the assembly of the frame and the plate being attached to a substrate, the micromirror comprising at least one magnetized layer (39, 40).